Please use this identifier to cite or link to this item: https://hdl.handle.net/10316/4321
DC FieldValueLanguage
dc.contributor.authorLouro, C.-
dc.contributor.authorCavaleiro, A.-
dc.date.accessioned2008-09-01T10:45:52Z-
dc.date.available2008-09-01T10:45:52Z-
dc.date.issued1999en_US
dc.identifier.citationThin Solid Films. 343-344:(1999) 51-56en_US
dc.identifier.urihttps://hdl.handle.net/10316/4321-
dc.description.abstractW-Si-N coatings were deposited by sputtering and their chemical composition, structure, thermal and oxidation behaviour were characterised. Si-containing films are essentially amorphous. W69Si31 film crystallises at 750 °C as [alpha]-W and W5Si3 phases whereas no significant structural transformations were observed for W24Si21N55 film up to 1000 °C, In both cases elemental diffusion (Si and N) for the substrate was detected after thermal annealing. These coatings present much better oxidation resistance than W and W45N55 coatings.en_US
dc.description.urihttp://www.sciencedirect.com/science/article/B6TW0-3Y6PSMH-21/1/4bbc4e5d0073b4d83d325b3e19383dd0en_US
dc.format.mimetypeaplication/PDFen
dc.language.isoengeng
dc.rightsopenAccesseng
dc.subjectOxidation resistanceen_US
dc.subjectSuicidesen_US
dc.subjectW-Si-N filmsen_US
dc.subjectTungsten silicideen_US
dc.subjectSputteringen_US
dc.titleThe oxidation behaviour of mixed tungsten silicon sputtered coatingsen_US
dc.typearticleen_US
dc.identifier.doi10.1016/S0040-6090(98)01568-5-
uc.controloAutoridadeSim-
item.languageiso639-1en-
item.fulltextCom Texto completo-
item.grantfulltextopen-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairetypearticle-
item.cerifentitytypePublications-
crisitem.author.researchunitCEMMPRE - Centre for Mechanical Engineering, Materials and Processes-
crisitem.author.researchunitCEMMPRE - Centre for Mechanical Engineering, Materials and Processes-
crisitem.author.orcid0000-0002-8142-0650-
crisitem.author.orcid0000-0001-8251-5099-
Appears in Collections:FCTUC Eng.Mecânica - Artigos em Revistas Internacionais
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